Micro Nano Mechanical Systems Lab (MNMS) at MECHSE
Nano and micro device fabrication.
About This Lab
The Micro-Nano-Mechanical Systems Cleanroom Laboratory within the Department of Mechanical Science and Engineering provides an opportunity for teaching, research, and discovery in a unique laboratory setting. The lab specializes in nano and micro device fabrication in a variety of materials. The lab consists of a cleanroom, prep room, metrology suite, and a semi-cleanroom with transfer and e-jet printing capabilities.
Location
213 Mechanical Engineering Building
1206 W Green St
Urbana, IL 61801
Questions? Contact:
Placid Ferreira
pferreir@illinois.edu
(217) 333-0639
Glennys Mensing
gmensing@illinois.edu
(217) 333-5694
Joe Maduzia
jmaduzi2@illinois.edu
(217) 244-6302